Lim Soo Chen

Engineer (Lithography)

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Singapore

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Timeline
About me
Senior Section Manager (Lithography) at GLOBALFOUNDRIES
Education
- Nanyang Technological University Singapore
  1995 - 1999
  Bachelor's degree (Honours) Mechanical Engineering
Experience
- Systems on Silicon Manufacturing Company Pte Ltd (SSMC)
  Jul 1999 - Apr 2004
  Engineer (Lithography)
  Key Responsibilities:• Litho technology transfer and startup team
- GlobalFoundries
  Apr 2004 - now
  Years in GlobalFoundries (Fab7) – 19 yrsTotal Experience in Semiconductor (Lithography) – 23 yrsKey Responsibilities:• New Production Introduction• United Module Development• New Technology Development• Process Engineering Continual Improvement• New FAB startup process & tool qualification• Drive customer quality improvements/projects/initiatives• Cross Site Collaboration and BKM Benchmarking• Material Quality/Cost/Inventory Management & Roadmap• Total Headcount - 30Career Highlights:Yr 2023• Lead team to qualify 2 major photochemical suppliers in new FAB.• Lead team to qualify 8 new tools within 2 months to support new FAB ramp-up.• Resolve Polyimide process inherent weakness to achieve highest watermark moves to meet 10% surge in capacity in Dec'23.Yr 2022• Role expansion to take on KRF/Iline/Polyimide tools and process team (with total headcount of 30 process engineer and 50 tools).• Tasked to lead litho process/tool qualification activities for new FAB startup with no delay or quality impact.Yr 2021• Role expansion to take on New Technology Group (NTG) / New Product Introduction (NPI) / United Module Development (UMD team) (with headcount of 20 process engineer).• Turned team from RED to Green within 1 year via new technology issues resolution to enable ramp-up.• Introduced Auto recipe creation concept and successfully launched recipe automation for scanner and overlay recipe. Man-hour reduction from 4hr to 1hr per device. Show less Key Responsibilities:• Photochemical Quality/Cost/Inventory Management• Recipe management and BKM Benchmarking and Best Practice implementation• Total headcount - 5Career Highlights:• Enabled Immersion FEOL RRC process after solvent EBR7030 Metallics/LPC improvement (cost saving 2mil per year).• Mapped out critical photochemical quality improvement roadmap to reduce inline quality excursions.• Cross Fab collaboration on BKM Benchmarking:- Achieved 70% critical defect reduction in Topcoatless photoresist with best practice implementation.• 100% supplier PCN qualification success with no delay or quality impact (1. Advance filtration 2. Materials go-green conversion 3. Alternate plant. 4. Mixing tank/Packaging material change etc.).• Lead taskforce (litho/facilities/FA lab/SQE) to work on solvent EBR7030 facilities ionic exchanger installation, qualification and full release. Show less
  - Senior Section Manager (Lithography)
    Jun 2020 - now
  - Member of Technical Staff (Lithography)
    Jan 2015 - Jun 2020
  - Principle Engineer (Lithography)
    Jan 2008 - Jan 2015
  - Senior Engineer (Lithography)
    Apr 2004 - Jan 2008
Licenses & Certifications
- Workshop on "Effective Process Mapping for ISO 9001:2000 Standard"
  PSB Academy
  Jan 2003
- Lithius Track Operations and Equipment PM training
  Tokyo Electron US
  Jan 2005
- Statistical Process Control
  Philips
  Jan 2003
- APQP, FMEA and Control Plans
  Omnex Inc
  Jan 2002
- Introduction to Microlithography
  SPIE, the international society for optics and photonics
  Jan 2000
- ISO 9001:2000 Interal Auditor Training with Specific Reference to ISO/TS 16969:2002
  Omnex Systems
  Jan 2003
Honors & Awards
- Awarded to Lim Soo Chen
  Spotlight Award for Process Inherent Weakness Resolution GLOBALFOUNDRIES Dec 2023 Resolved polyimide process inherent weakness which allows new process units addition to achieve highest watermark moves to overcome the additional 10% surge on capacity in Dec'23 to fulfill shipment and fabout requirement.
- Awarded to Lim Soo Chen
  Appreciation Award for Cost Reduction GLOBALFOUNDRIES Sep 2022 Cost Award - KrF Photochemical Volume Reduction (savings $120K/year)
- Awarded to Lim Soo Chen
  Women’s Recognition Award GLOBALFOUNDRIES Mar 2021 Honoring women who have made significant contributions to our GF missionand who are role models for our company values: Create,Embrace, Partner, and Deliver
- Awarded to Lim Soo Chen
  Appreciation Award for Cost Reduction GLOBALFOUNDRIES Jul 2020 Cost Award - SHINETSU photochemical go green qualification, 2 into 1 viscosity consolidation and volume reduction
- Awarded to Lim Soo Chen
  Appreciation Award for Cost Reduction GLOBALFOUDRIES Apr 2020 Cost Award - Dupont photochemical go green conversion and volume reduction
- Awarded to Lim Soo Chen
  CEO Award GLOBALFOUNDRIES Sep 2019 CEO Award - Crushing Suppliers' Cost of non-Quality
- Awarded to Lim Soo Chen
  Spotlight Award for Cost Reduction GLOBALFOUNDRIES Sep 2019 Cost Award - Enabled Immersion FEOL RRC process after solvent EBR7030 Metallics/LPC improvement (saving 2mil/year)
- Awarded to Lim Soo Chen
  Spotlight Award for Cost Reduction GLOBALFOUNDRIES Jan 2014 High production usage photoresist volume reduction from 3.5cc to below 1.0cc for multiple photoresist, cost saving of ~ 1500K per annum
- Awarded to Lim Soo Chen
  Appreciation Award for Cost Reduction GLOBALFOUNDRIES Jan 2013 High production usage photoresist volume reduction from 1.5cc to below 1.0cc for multiple photoresist, cost saving of ~ 600K per annum.
- Awarded to Lim Soo Chen
  Appreciation Award for Yield Improvement GLOBALFOUNDRIES Jan 2012 Successful installation of 0.18um Al BEOL process in 300mm FAB, in less than 2 months, get >80% yield and the ET parameters are >80% matched.
- Awarded to Lim Soo Chen
  Appreciation Award for Defect Reduction GLOBALFOUNDRIES Jan 2009 Edge-Bead-Removal solvent splash-back defect reduction from >10 counts to <3 counts.
- Awarded to Lim Soo Chen
  Appreciation Award for Defect Reduction GLOBALFOUNDRIES Jan 2008 Double puddle developer recipe optimization and implementation for KrF contact / via processes to reduce missing contact / via holes
- Awarded to Lim Soo Chen
  Appreciation Award for Defect Reduction GLOBALFOUNDRIES Jan 2007 Reduced (>2k total defect counts to <300 total defect counts) Satellite defect @ 130nm gate poly process.
- Awarded to Lim Soo Chen
  Appreciation Award for Cost Reduction GLOBALFOUNDRIES Cost Award - SHINETSU photochemical go green qualification, 2 into 1 viscosity consolidation and volume reduction