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Martin Burkhardt

Martin Burkhardt

Member of Technical Staff

Followers of Martin Burkhardt814 followers
location of Martin BurkhardtWhite Plains, New York, United States

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  • Timeline

  • About me

    Research Staff Member at IBM

  • Education

    • Technische Universität Berlin

      -
      Diplom-Ingenieur Electrical and Electronics Engineering mit Auszeichnung

    • Massachusetts Institute of Technology

      -

  • Experience

    • Texas Instruments

      Jul 1995 - Jul 1998
      Member of Technical Staff

      Semiconductor lithography, simulations, optical proximity correction

    • ASML

      Aug 1998 - Jul 2001
      Senior Designer

      Optical simulations for Microlithography, lens specifications

    • IBM

      Aug 2001 - now
      Research Staff Member

      Lithography Research, ArF, EUV, OPC, mask layout, physical simulations

    • SPIE, the international society for optics and photonics

      Feb 2017 - now
      Program Committee Member and Conference Chair Optical and EUV Nanolithography

  • Licenses & Certifications